High purity silica glass products
High-purity silica glass products essential for the semiconductor manufacturing process.
High-purity silica glass products that are essential for high-temperature operations in the semiconductor manufacturing process and do not undergo chemical changes with active gases. 【Features】 - Ideal for various equipment and fixtures, including CVD and diffusion furnace tubes. - A full lineup of quartz products necessary for semiconductor manufacturing processes: - Overflow tanks: Used in the wafer cleaning process for chemical treatment, accommodating various needs including products for 12-inch wafers. - Horizontal boats: Quartz boats used in the cleaning and reaction processes of wafers. - Vertical process tubes: Used in critical reaction processes such as diffusion in semiconductor manufacturing, accommodating the increasing diameter due to the introduction of 12-inch wafers. - Fin insulation tubes: Used for insulation at the bottom of vertical tubes; products using opaque quartz can also be manufactured. ● We offer a variety of other products. Please contact us for more details.
- Company：フェローテックホールディングス
- Price：Other
